Industrial Carbon Tetrafluoride CF4 Gas

• Customization: Available
• CAS No.: 75-73-0
• Formula: CF4
• Model NO.: 99.9%
• Constituent: Industrial Pure Air
• Grade Standard: Industrial Grade
• Chemical Property: Non-Flammable Gas
• Un Number: 1982
• Shipping Name: Tetrafluoromethane
• Hazard Class: 2.2
• Label: Nonflammable Gas
• General Description: Colorless/Nonflammable Gas
• Mol File: 75-73-0.Mol
• Transport Package: Cylinder
• Specification: 1.603g/cm3(-128º C) 27.330(cm· mol)
• Trademark: RM/OEM
• Origin: Qingdao, China
• HS Code: 2826199090
• Production Capacity: 1000 PCS Per Month

Product Description

Application of SF4:
carbon tetrafluoride is the largest amount of plasma etching gas in the microelectronics industry at present. It is a mixture of high purity gas and high purity oxygen of carbon tetrafluoride. It can be widely used in the etching of silicon, silicon dioxide, silicon nitride, phosphorous silicon glass and tungsten film materials.
For silicon and silicon dioxide systems, the selectivity of 45:1 can be obtained by adjusting the ratio of the two gases when using the reactive ion etching of cf4-h2, which is very useful for etching the silicon dioxide film on the polycrystalline silicon gate.

It is also widely used in surface cleaning of electronic devices, production of solar cells, laser technology, gas phase insulation, cryogenic refrigeration, leakage testing agent, control of space rocket attitude, and detergent in printing circuit production.

 COA of CF4 Gas

Item	Index
CF4,  %(V/V)≥	99.999	99.995	99.99
N2, 10-6(V/V) ≤	4	20	40
O2, 10-6(V/V) ≤	1	5	10
CO2, 10-6(V/V) ≤	1	5	10
CO, 10-6(V/V) ≤	0.3	0.5	1
SF6,  10-6(V/V) ≤	1	1	5
H2O, 10-6(V/V) ≤	1	5	10
HF, 10-6(V/V) ≤	0.1	0.3	0.3
TFC(CH2F2,CHF3,C2F3,C3F8),10-6(V/V) ≤	1	10	30
Total impurity content, ppm (V/V) ≤	10	50	100

CF4 Specification

Parameter Critical Assay	Unit	Company Specification	Analysis Results	Analysis Method
Tetrafluoromethane (CF4)	%(v/v)	99.999% Min	>99.999%	G.C
Oxygen(O2)	v.ppm	<1.0	<0.2	G.C
Nitrogen(N2)	v.ppm	<1.0	<0.6	G.C
Carbon Monoxide(CO)	v.ppm	<0.5	<0.2	G.C
Carbon Dioxide(CO2)	v.ppm	<0.5	<0.2	G.C
Sulfur Hexafluoride(SF6)	v.ppm	<0.2	<0.1	G.C
Trifluoromethane(CHF3)	v.ppm	<0.5	<0.1	G.C
Other Halocarbon(OFC)*	v.ppm	<1.0	<0.7	G.C
Total Hydrocarbon(THC)*	v.ppm	<0.5	<0.1	G.C
Moisture(H2O)	v.ppm	<0.5	<0.2	Moisture Analyzer
Acidity(as HF)	v.ppm	<0.1	<0.08	Acidity Analyzer
Total Contents Of Impurity	v.ppm	≤10.0	<10.0	G.C
Particale(>0.1μm)	pcs/liter	<10.0	<1.0	ICP-MS

About us:
Qingdao Ruiming Bluesky Energy Co., Ltd is located at Qingdao, the biggest seaport in China, owns the convenient shipping advantages.
        Ruiming are recognised by our customers as offering unparalleled technical knowledge & support resulting in the ability to provide cost effective and competitive solutions. We strive for our customers to enjoy working with us due to our friendly, reliable and professional attitude in all that we do. 
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1. Gas products: Argon gas, helium gas, hydrogen gas, Carbon oxide( CO2), propane gas, ect.
2. All kind of high pressure gas cylinder and welded gas cylinders: 
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        Acetylene Gas cylinder
        Liquid Chlorine Cylinder/ Liquid Ammonia Cylinder
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4. Dewar Flask: 175L 195L 495L capacity liquid tanks
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